Technology Group 1 (Lithography、Etching)
| Title | Name | Telephone / Fax | Responsibility Job | Deputy |
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Technology group 1
Leader
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Mr. Hu, Jack
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Office:03-5712121 ext.55607
Laboratory:03-5712121 ext.55689
Fax:03-5724241
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Coordination within the group 1 of related matters.
Responsible for the following instruments: Poly-Si RIE /
RIE 200L/ HDP-RIE / P5000E / Si Deep-RIE
|
|
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Technology group 1
Member
|
Mr. Lee, James
|
Office:03-5712121 ext.55660
Laboratory:03-5712121 ext.55666
Fax:03-5724241
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Responsible for the following instruments: Poly-Si RIE / RIE 200L / HDP-RIE / P5000E / Si Deep-RIE
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Mr. Hu, Jack (First Deputy)
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Technology group 1
Member
|
Miss Fan, Hsiu-Lan
|
Office:03-5712121 ext.55672
Laboratory:03-5712121 ext.55337/55676
Fax:03-5724241
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Responsible for the following instruments: SEM S-4700I / SEM SU-8010
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Mr. Chao , Jerry (First Deputy)
Mr. Hu, Jack (Second Deputy)
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Technology group 1
member
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Mr. Huang, Guo-Hua
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Office:03-5712121 ext.55659
Laboratory:03-5712121 ext.55667
Fax:03-5724241
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Responsible for the following instruments: Laser Pattern Generator, DWL-200
|
Mr. Tsai, Ching-Hsiang (First Deputy)
Mr. Lee, James (Second Deputy)
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Technology group 1
Member
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Office:03-5712121 ext.55605
Laboratory:03-5712121 ext.55616
Fax:03-5724241
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Responsible for the following instruments: Laser Pattern Generator, DWL-200 / Pattern Generator
|
Mr. Huang, Guo-Hua (First Deputy)
Mr. Chao , Jerry (Second Deputy)
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Technology group 1
Member
|
Mr. Chao , Jerry
|
Office:03-5712121 ext.55670
Laboratory:03-5712121 ext.55667
Fax:03-5724241
|
Responsible for the following instruments: Double Side Mask Aligner / Photo Resist Spinner / Vacuum Oven / Optical Microscope / Dektak XT
|
Miss Fan, Hsiu-Lan (First Deputy)
Mr. Tsai, Ching-Hsiang (Second Deputy)
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Technology Group 2 (High Temperature、Film)
| Title | Name | Telephone / Fax | Responsibility Job | Deputy |
|
Technology group 2
Leader
|
Mr. Lin, Sheng Chin
|
Office:03-5712121 ext.55668
Laboratory:03-5712121 ext.55610
Fax:03-5724241
|
Coordination within the group 2 of related matters.
Responsible for the following instruments: Oxidation & Diffusion Furnances / Dual E-Gun Evaporation System A
|
Mr. Lai, White (First Deputy)
Miss Ni, Yuech Chen (Second Deputy)
|
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Technology group 2
Member
|
Miss Liu, Yueh-En
|
Office:03-5712121 ext.55658
Laboratory:03-5712121 ext.55368
Fax:03-5724241
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Responsible for the following instruments: Dual beam [focused ion beam & electron beam] System (FIB)
|
Mr. Lin, Sheng Chin (First Deputy)
Mr. Lai, White (Second Deputy)
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Technology group 2
Member
|
Miss Ni, Yuech Chen
|
Office:03-5712121 ext.55669
Laboratory:03-5712121 ext.55608
Fax:03-5724241
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Responsible for the following instruments: Dual E-Gun Evaporation System B / Thermal Evaporation Coater / High Vacuum Deposition System
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Mr. Chan, Chia-Chi (First Deputy)
Mr. Fan, Yang-Chen (Second Deputy)
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Technology group 2
Member
|
Mr. Chan, Chia-Chi
|
Office:03-5712121 ext.55622
Laboratory:03-5712121 ext.55616/55666
Fax:03-5724241
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Responsible for the following instruments: ALD / LPCVD / Ellipsometer
|
Miss Ni, Yuech Chen (First Deputy)
|
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Technology group 2
Member
|
Mr. Lai, White
|
Office:03-5712121 ext.55606
Laboratory:03-5712121 ext.55616
Fax:03-5724241
|
Responsible for the following instruments: Wet Bench / LPCVD / PECVD / Reflectometer
|
Mr. Fan, Yang-Chen (First Deputy)
Mr. Lin, Sheng Chin (Second Deputy)
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Technology group 2
Member
|
Mr. Chang, Chen-Hsien |
Office:03-5712121 ext.55657
Laboratory:03-5712121 ext.55608
Fax:03-5724241
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Responsible for the following instruments: Sputtering System A / Sputtering System B / 4-point Probe
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Miss Ni, Yuech Chen (First Deputy)
Mr. Lai, White (Second Deputy)
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