The center was established in 1964 on the Po-Ai campus with the previous name of the semiconductor research center (SRC), which is the first semiconductor laboratory in Taiwan.  In 1965, SRC produced the first transistor in Taiwan and was recognized as the cradle of Taiwan semiconductor research and technology.  SRC then became a major base for cultivating semiconductor talents.  Many of our alumni have later become leaders in Taiwan IC industrial companies.  Given the significant advancements made in IC technology after 2000, SRC was renamed as Nano Facility Center (NFC) in 2003.

NFC is in charge of two clean rooms located at the Solid-State Electronics System (SSES) Building on Kuan-Fu Campus and the SRC building on Po-Ai campus, respectively.  The total area of the clean rooms is close to 4000 m2, the largest among universities in Taiwan.  Currently, NFC has 23 full-time staff members including 19 engineers and technicians responsible for running the processes and maintaining the equipment. The operation of NFC is under the supervision of an equipment committee comprising 10 professors from different institutes and departments who help the management and decision-making on the purchase of new equipment.  NFC is open 24 hours per day for the students, research scientists, and engineers doing research.  The process platform of the NFC facilitates projects conducted on advanced and emerging semiconductor technologies, including nanometer-scaled CMOS, memories, quantum devices, optoelectronics, 2D TMD FETs, nano- and micro-machines, wide-bandgap semiconductor devices, etc.  Service and support from NFC are also accessible to other universities and research organizations in Taiwan.  Each year, there are more than 500 graduate students conducting their thesis research at NFC.