Nano Facility Center Director Name: Lin, Horng-Chih Telephone: 03-5712121 ext. 55601 or 54193 Fax:03-5714241 Management Instrument: 24-hour application case / 4-point Probe / PECVD Expertise: CMOS device reliability analysis, advanced nano device structure design and manufacturing, thin film device manufacturing and analysis.

Instrument Committee

	Name: Wu, Yew-Chung Telephone: 03-5712121-31555 Fax: 03-57247271 Management Instrument:FIB Expertise: Thin film transistors, wafer bonding, optoelectronic semiconductor components, III-V epitaxy technology, protein crystal growth		Name: Li, Pei-Wen Telephone: 03-5712121-54210 Fax: 03-5724361 Management Instrument:DWL-200/Pattern Generator. Expertise: Nanoelectronic engineering, semiconductor physical components, integrated circuit process design.
	Name: Hou, Tuo-Hung (Alex) Telephone: 03-5712121-54261 Fax: 03-5724361 Management Instrument:Mask Aligner / Spinner / HMDS Expertise: Nano memory device, molecular electronic device, nano process technology, semiconductor device physics.		Name: Tsui, Bing-Yue Telephone: 03-5712121-31570 Fax: 03-5724361 Management Instrument:Wet Bench P5000E / RIE-400iP-1 / RIE 200L / Ellipsometer. Expertise: Semiconductor physics and components, integrated circuit manufacturing process, telecom measurement analysis.
	Name: Chen, Kuan-Neng Telephone: 03-5712121-31558 Fax: 03-5724361 Management Instrument: HDP-RIE / Si Deep-RIE. Expertise:Three-dimensional integrated circuit (3D IC), wafer bonding thinning technology, through-silicon via (TSV)		Name: Liu, Po-Tsun Telephone: 03-5712121-52994 Fax: 03-5737681 Management Instrument: Oxidation & Diffusion Furnances / LPCVD Expertise: Integrated circuits and systems, semiconductor materials and components, optoelectronics and thin film technology.
	Name: Chao, Tien-Sheng Telephone: 03-5712121-31367 Fax: 03-5725235 Management Instrument: ALD / Reflectometer. Expertise: DTMOS device fabrication and reliability analysis, NBTI measurement and analysis of semiconductor device physical PMOSFET, nano device fabrication.		Name: Cheng, Yu-Ting Telephone: 03-5712121-54169 Fax: 03-5724361 Management Instrument: High Vacuum Deposition System / Sputtering System A / Sputtering System B Expertise: MEMS, nanotechnology, system packaging.
	Name: Tan, Chih-Shan Telephone: 03-5712121-54146 Fax: 03-5724361 Management Instrument: S-4700I / SEM SU-8010 Expertise: Compound semiconductors, semiconductor electronic structures, wide band semiconductors, organic optoelectronic components.		Name:Su, Chun-Jung Telephone: 03-5712121-56150 Fax: 03-5725230 Management Instrument: Poly-Si RIE / Boai’s Principal. Expertise:Nanoelectronic device technology, Semiconductor device and physics, Non-volatile memory devices.