 |
Instrument Manager: Mr. Lai, White (TEL：03-5712121-55668、55616) (Mail：white@nycu.edu.tw) Instrument Committee: Prof. Lin, Horng-Chih (TEL：03-5712121-54193) (Mail：hclin@nycu.edu.tw) |
Information:
1.Brand Model: Samco PD220N#4123
2.Purchase Date: 2023/5
3.Seat: Solid-State Electronics Building, 1F, R116 (TEL：55666)
4.Services: SiO2 or Si3N4 deposition
5.Specifications:
(1).Chamber Temperature: 350 ˚C.
(2).Wafer size : ≦ 8 inch.
(3).Gases: N2O, NH3 ,CF4, SiH4+Ar, N2,O2 for low temperature SiO2 or Si3N4 deposition.
Already have instrument use authority, must go to following website:
1.The Instruments Information System (Get Serial number)
2.Machine Reservation System(Reservation Use period)
Original Equipment Manufacturer: PECVD Original Equipment Manufacturer
Charging Method:
1.“Ministry of Science and Technology” Project Expense:
| School Organization | Research Organization | Profit-Making Enterprise | |
| Foundry fee (NTD/Once) | 900 | 900 | 900 |
| Startup fee (NTD/hour) | 225 | 270 | 270 |
|
Production costs (NTD/hour)
SiO2,Si3N4
|
225 | 270 | 270 |
2.Not “Ministry of Science and Technology” Project Expense:
| School Organization | Research Organization | Profit-Making Enterprise | |
| Foundry fee (NTD/Once) | 900 | 900 | 900 |
| Startup fee (NTD/hour) | 450 | 2704 | 2704 |
|
Production costs (NTD/hour)
SiO2,Si3N4
|
450 | 2704 | 2704 |
Appeal phone:
1.TEL：03-5712121 ext.31534、31248 / 03-5131534
2.TEL：03-5712121 ext.31775 / 03-5731775
3.Dedicated telephone：03-6116690