Instrument Manager: Mr. Lai, White (TEL：03-5712121-55668、55616) (Mail：white@nycu.edu.tw) Instrument Committee: Prof. Lin, Horng-Chih (TEL：03-5712121-54193) (Mail：hclin@nycu.edu.tw)

Information:

1.Brand Model: Samco

2.Purchase Date: 1998/7/8

3.Seat: Solid-State Electronics Building, 1F, 116R (TEL：55666) 

4.Services: SiO₂ or Si₃N₄ deposition

5.Specifications:

(1).Chamber Temperature: 300 ˚C.

(2).Wafer size : ≦ 4 inch.

(3).Gases: N2O, NH3 ,CF4, SiH4+Ar, N2 for low temperature SiO2 or Si3N4 deposition.

6.Machine Open Level, Open people, Training times.

7.Operation Manual  and Qualification Record Sheet.

Already have instrument use authority, must go to following website:

1.The Instruments Information System (Get Serial number)

2.Machine Reservation System(Reservation Use period)

Original Equipment Manufacturer: PECVD Original Equipment Manufacturer

Charging Method:

1.“Ministry of Science and Technology” Project Expense:

	School Organization	Research Organization	Profit-Making Enterprise
Foundry fee (NTD/Once)	900	900	900
Startup fee (NTD/hour)	217	263	263
Production costs (NTD/hour) SiO2,Si3N4	217	263	263

2.Not “Ministry of Science and Technology” Project Expense: 

	學校單位	研究單位	營利事業單位
Foundry fee (NTD/Once)	900	900	900
Startup fee (NTD/hour)	434	2625	2625
Production costs (NTD/hour) SiO2,Si3N4	434	2625	2625

Appeal phone:

1.TEL：03-5712121 ext.31534、31248 / 03-5131534

2.TEL：03-5712121 ext.31775 / 03-5731775

3.Dedicated telephone：03-6116690