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Instrument Manager: Mr. Ke, Ming-Yi
(TEL：03-5712121-55659、55667、55616)
(Mail：mingyi@nycu.edu.tw)
Instrument Manager: Mr. Tsai, Ching-Hsiang
(TEL：03-5712121-55605、55616)
(Mail：ch-tsai@nycu.edu.tw)
Instrument Committee: Prof. Li, Pei-Wen
(TEL：03-5712121-54210 )
(Mail：pwli@nycu.edu.tw)
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Information:
1.Brand Model: HIMT DWL-200
2.Purchase Date: 2007/4/1
3.Seat: Solid-State Electronics Building, 1F, 139R (TEL：55616)
4.Services: Fabrication of 4″、5″ mask (Glass)
5.Specifications:
1.Laser source : 442 nm ( g-line) He-Cd Laser power: 125 mW.
2.Minimum feature size: 0.8 μm
3.Maximum exposure area: 200 mm × 200 mm
4.Support GDSII and AutoCAD dxf format.
5.Mask template: Sodalime (4、5 and 6 inch) and Quartz (5 inch).
Original Equipment Manufacturer: DWL-200 Original Equipment Manufacturer
Charging Method:
1.“Ministry of Science and Technology” Project Expense:
| School Organization | Research Organization | Profit-Making Enterprise | |
| Picture Processing fee (NTD/ hour、piece) | 100 | 100 | From 1500 yuan |
| Live Picture fee (NTD/ hour、piece) | 100 | 100 | |
| 4″glass (NTD) | 950 | 1200 | |
| 5″glass (NTD) | 1100 | 1300 | |
| 6“glass (NTD) | 1500 | 1700 | |
2.Not “Ministry of Science and Technology” Project Expense:
| School Organization | Research Organization | Profit-Making Enterprise | |
| Picture Processing fee (NTD/ hour、piece) | 1000 | 1000 | From 15000 yuan |
| Live Picture fee (NTD/ hour、piece) | 1000 | 1000 | |
| 4″glass (NTD) | 9500 | 12000 | |
| 5″glass (NTD) | 11000 | 13000 | |
| 6“glass (NTD) | 15000 | 17000 | |
Appeal phone:
1.TEL：03-5712121 ext.31534、31248 / 03-5131534
2.TEL：03-5712121 ext.31775 / 03-5731775
3.Dedicated telephone：03-6116690