Instrument Manager: Mr. Chan, Chia-Chi (TEL：03-5712121-55622、55616) (Mail：chiachichan@nycu.edu.tw) Instrument Committee: Prof. Chao, Tien-Sheng (TEL：03-5712121-31367) (Mail：tschao@nycu.edu.tw)

Information:

1.Brand Model: Picosun R-200

2.Purchase Date: 2018

3.Seat: Solid-State Electronics Building, 1F, R122 (TEL：55616) 

4.Services:

(1).Equipped with two chambers with twelve precursor lines, and each chamber has five gas lines.

(2).Equipped with remote plasma sources which can execute plasma-enhanced deposition besides thermal deposition.

(3).Capable of depositing high-k and metal nitride thin films.

(4).Film thickness can be precisely controlled at angstrom scale.

(5).Applicable wafer size: smaller than 8 inch.

5.Specifications: Al2O3、HfO2、ZrO2、AlN、HfN

6.Machine Open Level, Open people, Training times.

7.Operation Manual  and Qualification Record Sheet.

Already have instrument use authority, must go to following website:

1.The Instruments Information System (Get Serial number)

2.Machine Reservation System(Reservation Use period)

Original Equipment Manufacturer: ALD Original Equipment Manufacturer

Charging Method:

1.“Ministry of Science and Technology” Project Expense:

	School Organization	Research Organization	Profit-Making Enterprise
Foundry fee (NTD/ 3 run or 6 hours)	900	900	900
Usage fee (NTD/hour)	309	309	309
material fee (NTD/10cycle)	Al: 36    Hf: 46   Ti: 46   Zr: 46 Ta:46

2.Not “Ministry of Science and Technology” Project Expense: 

	School Organization	Research Organization	Profit-Making Enterprise
Foundry fee (NTD/ 3 run or 6 hours)	900	900	900
Usage fee (NTD/hour)	618	5150	5150
material fee (NTD/10cycle)	(School Organization) Al: 72  Hf: 92   Ti: 92  Zr: 92 Ta:92 (Research Organization/Profit-Making Enterprise) Al: 360  Hf: 460  Ti: 460  Zr: 460 Ta:460

Appeal phone:

1.TEL：03-5712121 ext.31534、31248 / 03-5131534

2.TEL：03-5712121 ext.31775 / 03-5731775

3.Dedicated telephone：03-6116690