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Machine：Spin coater for thick photoresist
Instrument Committee：Prof. Hsu, Wen-Syang
Laboratory Phone：55149
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Information:
1.Brand Model: Karl Suss RC-8
2.Purchase Date: 1998/5/26
3.Seat: Boai campus Nano Facility Center 2F, 218R (TEL:55679)
4.Services: Thick film photoresist coating.
5.Specifications:
(1).Multi-stage speed and time control.
(2).This machine is only for thick film photoresist coating.
(3).This machine only provides 4-inch chips for use.
(4).The maximum speed when the metal cover is opened is 1000rpm.
(5).The maximum speed when the metal upper cover is closed is 5000rpm.
(6).Allowable maximum acceleration(ACCN)：3000rpm/s.