Machine：UV exposuer Instrument Committee：Prof. Meng, Hsin-Fei Laboratory Phone：56223

Information:

1.Brand Model: WSP 3648

2.Purchase Date: 2001/7/6

3.Seat: Boai campus Nano Facility Center 2F, 217R  (TEL:55679)

4.Services: The use of photoresist exposure in the ITO glass drive circuit process.

5.Specifications:

(1).Exposure light source: UV lamp

(2).Exposure image range：50 cm × 50 cm