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Instrument Committee: Prof. Cheng, Yu-Ting
(TEL：03-5712121-54169)
(Mail：ytcheng@mail.nctu.edu.tw)
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Information:
1.Brand Model: Ion Tech Microvac 450CB
2.Purchase Date: 1991/4
3.Seat: Solid-State Electronics Building, 3F (TEL：55608)
4.Services: Film Deposition
5.Specifications:
(1). Cathode: 4 inch × 3 (magnetic).
(2). Power RF 600 W × 1, DC 1.5 KW × 2.
(3). Substrate: 4 inch × 6 or 6 inch × 3.
(4). Gases: MFC for Ar, O2，N2
(5). Air extraction system: RP + Cryo Pump
Already have instrument use authority, must go to following website:
1.The Instruments Information System (Get Serial number)
2.Machine Reservation System(Reservation Use period)
Original Equipment Manufacturer: Sputtering System Original Equipment Manufacturer
Charging Method:
1.“Ministry of Science and Technology” Project Expense:
| School Organization | Research Organization | Profit-Making Enterprise | |
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Foundry fee (NTD/Run)
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900 | 900 | 900 |
| Startup fee (NTD/Once) | 600 | 900 | 900 |
| Material fee (NTD/KA) | Al=85 / Co=90 / Cr=110 / Cu=70 / Fe=70 / Mg=110 / Mo=70 / Ni=170 / Ta=220 / Ti=140 / TiW=200 / W=110 / TaSi2=220 / W5Si=110 / Pt=current price / Pd=current price |
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2.Not “Ministry of Science and Technology” Project Expense:
| School Organization | Research Organization | Profit-Making Enterprise | |
| Foundry fee (NTD/Run) | 900 | 900 | 900 |
| Startup fee (NTD/Once) | 1200 | 9000 | 9000 |
| Material fee (NTD/KA) |
(School Organization):
Al=170 / Co=180 / Cr=220 / Cu=140 / Fe=140 / Mg=220 / Mo=140 / Ni=340 / Ta=440 / Ti=280 / TiW=400 / W=220 / TaSi2=440 / W5Si=220 / Pt=current price / Pd=current price
(Research Organization/Profit-Making Enterprise):
Al=850 / Co=900 / Cr=1100 / Cu=700 / Fe=700 / Mg=1100 / Mo=700 / Ni=1700 / Ta=2200 / Ti=1400 / TiW=2000 / W=1100 / TaSi2=2200 / W5Si=1100 / Pt=current price / Pd=current price
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Appeal phone:
1.TEL：03-5712121 ext.31534、31248 / 03-5131534
2.TEL：03-5712121 ext.31775 / 03-5731775
3.Dedicated telephone：03-6116690