Instrument Manager: Mr. Hu, Jack    (TEL：03-5712121-55607 / 55666) (Mail：jackhu@nycu.edu.tw) Instrument Manager: Mr. Lee, James  (TEL：03-5712121-55660 / 55666) (Mail：cwlee@nycu.edu.tw) Instrument Committee: Prof. Tsui, Bing-Yue (TEL：03-5712121-31570) (Mail：bytsui@nycu.edu.tw)

Information:

1.Brand Model: SAMCO –RIE200L

2.Purchase Date: 2002/12/1

3.Seat: Solid-State Electronics Building, 1F, 116R (TEL：55666) 

4.Services: SiO2, Si3N4 etching

(1). Etching materials：SiO2 and Si3N4. 

(2). System features: One load lock chamber, one  etch  chamber and three vacuum pumps.

(3). Maximum RF (13.56 MHz) output power: 300 W.

(4). Operation modes: Automatic or manual.

5.Machine Open Level, Open people, Training times.

6.Operation Manual  and Qualification Record Sheet.

Already have instrument use authority, must go to following website:

1.The Instruments Information System (Get Serial number)

2.Machine Reservation System(Reservation Use period)

Original Equipment Manufacturer: RIE-200L Original Equipment Manufacturer

Charging Method:

1.“Ministry of Science and Technology” Project Expense:

	School Organization	Research Organization	Profit-Making Enterprise
Foundry fee (NTD/ 2 hours)	900	900	900
Usage fee (NTD/hour)(SiO2,SiNx)	230	250	280

2.Not “Ministry of Science and Technology” Project Expense: 

	School Organization	Research Organization	Profit-Making Enterprise
Foundry fee (NTD/ 2 hours)	900	900	900
Usage fee (NTD/hour)(SiO2,SiNx)	2300	2500	2800

Appeal phone:

1.TEL：03-5712121 ext.31534、31248 / 03-5131534

2.TEL：03-5712121 ext.31775 / 03-5731775

3.Dedicated telephone：03-6116690