Instrument Manager: Mr. Hu, Jack    (TEL：03-5712121-55607 / 55666) (Mail：jackhu@nycu.edu.tw) Instrument Manager: Mr. Lee, James  (TEL：03-5712121-55660 / 55666) (Mail：cwlee@nycu.edu.tw) Instrument Committee: Prof. Chen, Kuan-Neng (TEL：03-5712121-31558) (Mail：knchen@nycu.edu.tw)

Information:

1.Brand Model: SAMCO – RIE-10N

2.Purchase Date: 1999/3

3.Seat: Solid-State Electronics Building, 1F, 116R (TEL：55666) 

4.Services: Dry Etching for Al

(1).Gas: BCl3、Cl2、CF4、CHF3、Ar、O2、SF6

(2).ICP RF: 900W

(3).Bias RF: 300 W.

(4).He gas

(5).4″ wafer

5.Machine Open Level, Open people, Training times.

6.Operation Manual  and Qualification Record Sheet.

Already have instrument use authority, must go to following website:

1.The Instruments Information System (Get Serial number)

2.Machine Reservation System(Reservation Use period)

Original Equipment Manufacturer: Poly-Si RIE Original Equipment Manufacturer

Charging Method:

1.“Ministry of Science and Technology” Project Expense:

	School Organization	Research Organization	Profit-Making Enterprise
Foundry fee (NTD/ 2 hours)	900	900	900
Usage fee (Poly Si)(NTD/hour)	230	230	260

2.Not “Ministry of Science and Technology” Project Expense: 

	School Organization	Research Organization	Profit-Making Enterprise
Foundry fee (NTD/ 2 hours)	900	900	900
Usage fee (Poly Si)(NTD/hour)	2300	2300	2600

Appeal phone:

1.TEL：03-5712121 ext.31534、31248 / 03-5131534

2.TEL：03-5712121 ext.31775 / 03-5731775

3.Dedicated telephone：03-6116690