Instrument Manager: Mr. Hu, Jack    (TEL：03-5712121-55607 / 55666) (Mail：jackhu@nycu.edu.tw) Instrument Manager: Mr. Lee, James  (TEL：03-5712121-55660 / 55666) (Mail：cwlee@nycu.edu.tw) Instrument Committee: Prof. Chen, Kuan-Neng (TEL：03-5712121-31558) (Mail：knchen@nycu.edu.tw)

Information:

1.Brand Model: SAMCO – RIE-10N

2.Purchase Date: 1995/9/13

3.Seat: Solid-State Electronics Building, 1F, 116R (TEL：55666) 

4.Services: (Note : Impurity dopant and metal on samples are NOT allowed to load in the chamber.)

(1).Etching materials: Poly-Si and Si.

(2).System features: One etch chamber and  two vacuum pumps.

(3).Maximum RF (13.56 MHz) output power: 300 W.

(4).Operation modes: Automatic or manual.

5.Machine Open Level, Open people, Training times.

6.Operation Manual  and Qualification Record Sheet.

Already have instrument use authority, must go to following website:

1.The Instruments Information System (Get Serial number)

2.Machine Reservation System(Reservation Use period)

Original Equipment Manufacturer: Poly-Si RIE Original Equipment Manufacturer

Charging Method:

1.“Ministry of Science and Technology” Project Expense:

	School Organization	Research Organization	Profit-Making Enterprise
Foundry fee (NTD/ 2 hours)	900	900	900
Usage fee (Poly Si)(NTD/hour)	160	160	220

2.Not “Ministry of Science and Technology” Project Expense: 

	School Organization	Research Organization	Profit-Making Enterprise
Foundry fee (NTD/ 2 hours)	900	900	900
Usage fee (Poly Si)(NTD/hour)	1600	1600	2200

Appeal phone:

1.TEL：03-5712121 ext.31534、31248 / 03-5131534

2.TEL：03-5712121 ext.31775 / 03-5731775

3.Dedicated telephone：03-6116690