Instrument Manager: Mr. Tsai, Ching-Hsiang  (TEL：03-5712121-55605、55616)  (Mail：ch-tsai@nycu.edu.tw) Instrument Committee: Prof. Li, Pei-Wen (TEL：03-5712121-54210 ) (Mail：pwli@nycu.edu.tw)

Information:

1.Brand Model: Raith VOYAGER

2.Purchase Date: 2019

3.Seat: Solid-State Electronics Building, 1F, 118R (TEL：55667) 

4.Services: 

5.Specifications:

(1).Electron Beam

(2).Maximum beam energy：50kV

(3).Maximum write field：500μm

(4).50MHz Pattern Generator

6.Machine Open Level, Open people, Training times.

7.Operation Manual  and Qualification Record Sheet.

Already have instrument use authority, must go to following website:

1.The Instruments Information System (Get Serial number)

2.Machine Reservation System(Reservation Use period)

Original Equipment Manufacturer: Pattern Generator Original Equipment Manufacturer

Charging Method:

1.“Ministry of Science and Technology” Project Expense:

	School Organization	Research Organization	Profit-Making Enterprise
Foundry fee  (NTD/piece)	1000	1000	1000
Startup fee  (NTD/Once)	–	–	2000
Usage fee (NTD/hour)	210	320	600

2.Not “Ministry of Science and Technology” Project Expense: 

	School Organization	Research Organization	Profit-Making Enterprise
Foundry fee  (NTD/piece)	1000	1000	1000
Startup fee  (NTD/Once)	–	–	20000
Usage fee (NTD/hour)	2100	3200	6000

Appeal phone:

1.TEL：03-5712121 ext.31534、31248 / 03-5131534

2.TEL：03-5712121 ext.31775 / 03-5731775

3.Dedicated telephone：03-6116690