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Instrument Manager: Mr. Lai, White
(TEL：03-5712121-55668、55616)
(Mail：white@nycu.edu.tw)
Instrument Committee: Prof. Tsui, Bing-Yue
(TEL：03-5712121-31570)
(Mail：bytsui@nycu.edu.tw )
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Information:
1.Brand Model: JIA YU APPARATUS
2.Purchase Date: 2014/11/06
3.Seat: Solid-State Electronics Building, 1F, 141R (TEL：55616)
4.Services: RCA Cleaning for Silicon or Quartz Wafers.(Including each cleaning step such as acid boiling,etching,rinsing,etc.)
Original Equipment Manufacturer: Wet Bench Original Equipment Manufacturer
Charging Method:
| School Organization | Research Organization | Profit-Making Enterprise | |
| Foundry fee (NTD/Once) | 900 | 900 | 900 |
| RCA Cleaning (3″& 4″(Once)) | 1800 | 1800 | 2000 |
| Initial H2SO4 (3″& 4″(Once)) | 700 | 700 | 800 |
| Etching poly | 500 | 500 | 500 |
| Etching Al | 500 | 500 | 500 |
| BOE Etching | 300 | 300 | 300 |
| HF Dip & Rinse | 100 | 100 | 100 |
| ACE 3″(600c.c)&4″(1200c.c) | 500 | 500 | 600 |
Appeal phone:
1.TEL：03-5712121 ext.31534、31248 / 03-5131534
2.TEL：03-5712121 ext.31775 / 03-5731775
3.Dedicated telephone：03-6116690