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Machine：Hermal Evaporator + Glove Box
Instrument Committee：Prof. Meng, Hsin-Fei
Laboratory Phone：56223
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Information:
1.Brand Model: Thermal resistance evaporation system: Junshang / Glovebox: Yilian
2.Purchase Date: 2008
3.Seat: Boai campus Nano Facility Center 2F, 114R (TEL:55683)
4.Services: The use of photoresist exposure in the ITO glass drive circuit process.
5.Specifications:
(1).Hermal Evaporator:
(a).Metal and organic materials can be deposited on substrates below 70mm × 70mm.
(b).The evaporation room reaches 5 × 10-6 Torr about 30 minutes.
(2).Glove box:
(a).Movable water and oxygen analyzer.
(b).Provide spin coater.
(c).This system provides UV packaging equipment.
Application form: Experiment application form
Charging standard:
| School Organization/Research Organization | Profit-Making Enterprise | |
| Delegated operation (NTD/hr) | 600 | 1500 |
| Self Operation (NTD/hr) | 300 | Not open |
| Assessment training (NTD/Once) | 300 | Not open |
| Material cost (NTD/Once) | Al=200 / Ca=500 / LiF=300 / MoO3=500 / Au=Current price / Ag=Current price / pentacene=Current price / C60=Current price | |