Instrument Manager: Miss Ni, Yuech Chen (TEL：03-5712121-55669、55608) (Mail：ycni@nycu.edu.tw) Instrument Committee: Prof. Cheng, Yu-Ting (TEL：03-5712121-54169) (Mail：ytcheng@mail.nctu.edu.tw)

Information:

1.Brand Model: ULVAC EBX-6D

2.Purchase Date: 1995/1/20

3.Seat: Solid-State Electronics Building, 3F (TEL：55608) 

4.Services: Al film deposition.

5.Specifications: 

(1). Al film deposition.

(2). Put Al slug on the W boat, the Al slug will evaporate.

(3). Substrate：4  inch  × 8 or 6 inch  × 5.

6.Machine Open Level, Open people, Training times.

7.Operation Manual  and Qualification Record Sheet.

Already have instrument use authority, must go to following website:

1.The Instruments Information System (Get Serial number)

2.Machine Reservation System(Reservation Use period)

Original Equipment Manufacturer: Thermal Evaporation Coater Original Equipment Manufacturer

Charging Method:

1.“Ministry of Science and Technology” Project Expense:

	School Organization	Research Organization	Profit-Making Enterprise
Foundry fee  (NTD/Once)	900	900	900
Startup fee (NTD/Once)	440	550	550
Material fee (NTD/KA) under 5KA	110	110	110
Material fee (NTD/KA) 5KA~10KA	220	220	220

2.Not “Ministry of Science and Technology” Project Expense: 

	School Organization	Research Organization	Profit-Making Enterprise
Foundry fee  (NTD/Once)	900	900	900
Startup fee (NTD/Once)	880	5500	5500
Material fee (NTD/KA) under 5KA	220	1100	1100
Material fee (NTD/KA) 5KA~10KA	440	2200	2200

Appeal phone:

1.TEL：03-5712121 ext.31534、31248 / 03-5131534

2.TEL：03-5712121 ext.31775 / 03-5731775

3.Dedicated telephone：03-6116690