Thermal Coater – Nano Facility Center

Machine：Thermal Coater

Instrument Committee：Prof. We, Kung-Hwa

Laboratory Phone：31771

Information:

1.Brand Model: ULVAC

2.Purchase Date: 2006

3.Seat: Boai campus Nano Facility Center 2F, 211R (TEL:55662)

4.Services: Use heating method to vaporize materials needed.

5.Specifications:

A.Vacuum chamber:

(1).Approximate cavity size：400 * 400* 550 mm

(2).Contains 4 ψ2 inch substrates, with shutter mode window.

(3).The size of the substrate that is rotated by revolution is 2 inch substrate. The substrate rotation needs to be able to adjust the speed.

(4).The cavity can be heated to 200℃, and the control is controlled by SCR PID

(5).The inner surface is electrolytically polished, and the outside of the cavity is water-cooled pipe.

(6).Manual front open/close chamber door.

(7).Spare 1 port for buffer tank connection in glove box.

(8).Coating protection shieldings.

B.The main exhaust system is a combination of mechanical pump and cryo pump:

(1).Cryo-Pump with compressor (At least 4,000 l/s for H2O(g) )

(2).Tow-stages rotary pump (At least 600 l/min at 60Hz)

C.Quartz oscillator monitors real-time control of film thickness. Its business margin is controlled below 5000Å ≦± 20﹪.

D.Control system, the system is automatic exhaust, automatic coating.