Machine：3D profile and surface roughness measurement instrument Instrument Committee：Prof. Hsu, Wen-Syang Laboratory Phone：55149

Information:

1.Brand Model: Kosaka Laboratory Ltd. , ET-4000

2.Purchase Date: 2001/12

3.Seat: Boai campus Nano Facility Center 2F, 215R  (TEL:55682)

4.Services:

5.Specifications:

(1).Wafer：Under 8”~

(2).Z Direction measurement range：±50μm

(3).Z Direction resolution：0.1nm

(4).Determination of force：0.05~50mgf

(5).Stylus radius：0.5μm