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Instrument Committee: Prof. Cheng, Yu-Ting
(TEL：03-5712121-54169)
(Mail：ytcheng@mail.nctu.edu.tw)
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Information:
1.Brand Model: KAO DUEN
2.Purchase Date: 2009/4
3.Seat: Solid-State Electronics Building, 3F (TEL：55608)
4.Services: Film Deposition
5.Specifications:
(1). Cathode: 6 inch × 3 (magnetic).
(2). RF power 1 KW × 1, DC 2.5 KW × 2.
(3). Substrate: 6 inch × 6 or 4 inch × 6.
(4). Gases: MFC for Ar、N2與O2
(5). Air extraction system: RP + Cryo Pump
Already have instrument use authority, must go to following website:
1.The Instruments Information System (Get Serial number)
2.Machine Reservation System(Reservation Use period)
Original Equipment Manufacturer: Sputtering System Original Equipment Manufacturer
Charging Method:
1.“Ministry of Science and Technology” Project Expense:
| School Organization | Research Organization | Profit-Making Enterprise | |
| Foundry fee (NTD/Once) | 900 | 900 | 900 |
| Startup fee (NTD/Once) | 600 | 900 | 900 |
| Material fee (NTD/KA) | Ti=140 / Ni=280 / Ta=550 / Hf=940 |
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2.Not “Ministry of Science and Technology” Project Expense:
| School Organization | Research Organization | Profit-Making Enterprise | |
| Foundry fee (NTD/Once) | 900 | 900 | 900 |
| Startup fee (NTD/Once) | 1200 | 9000 | 9000 |
| Material fee (NTD/KA) |
(School Organization): Ti=280 / Ni=560 / Ta=1100 / Hf=1880
(Research Organization/Profit-Making Enterprise): Ti=1400 / Ni=2800 / Ta=5500 / Hf=9400
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Appeal phone:
1.TEL：03-5712121 ext.31534、31248 / 03-5131534
2.TEL：03-5712121 ext.31775 / 03-5731775
3.Dedicated telephone：03-6116690