Machine：Photoresist Spinner Instrument Committee：Prof. Hsu, Wen-Syang Laboratory Phone：55149

Information:

1.Brand Model: KYOWARIKEN  K-359SD-1

2.Purchase Date: 2001/12/28

3.Seat: Boai campus Nano Facility Center 2F, 218R  (TEL:55679)

4.Services: Coating of photoresist.

5.Specifications:

(1).Up to three speeds and time control.

(2).Maximum speed is 6000rpm.