Instrument Manager: Mr. Lai, White (TEL：03-5712121-55606  / 55616) (Mail：white@nycu.edu.tw) Instrument Committee: Prof. Chao, Tien-Sheng (TEL：03-5712121-31367) (Mail：tschao@nycu.edu.tw)

Information:

1.Brand Model: SR-SEMI_RTC11001U

2.Purchase Date: 2015

3.Seat: Solid-State Electronics Building 1F 135R　(TEL：55609)

4.Services:

(1). Measurement SiO2, Si₃N₄, Poly-Si, TEOS…. (Transparent film)

(2). Sample Size：Mix. 6 inch

5.Specifications:

(1).In the same layer, you can simulate the mixing ratio of two kinds of different materials.

(2).Can simulate the phenomenon of uneven rough surface of the film.

(3). The three-layer film can be measured.

(4).The built-in database of approximately 100 groups provide a refractive index n and extinction coefficient k value.

(5).Coordinate the establishment of a variety of different patterns.

(6).The multi-point automatic measurement.

(7).Using the cross mirror confirm standard reference sample and samples working distance whether the same.

(8).Raditech software can choose operator mode and engineer mode.

(9).We can use remote desktop connection to support measurement and training.

6.Machine Open Level, Open people, Training times.

7.Operation Manual  and Qualification Record Sheet.

Already have instrument use authority, must go to following website:

1.Machine Reservation System(Reservation Use period)

Original Equipment Manufacturer: Reflectometer Original Equipment Manufacturer

Charging Method:

	School Organization	Research Organization	Profit-Making Enterprise
Foundry fee  (NTD/Once)	900	900	900
Startup fee (NTD/Once)	600	850	1000
Within five dots per piece	150	360	500
Exceed by one dot	120	180	250