Instrument Manager: Miss. Ni, Yuech Chen  (TEL：03-5712121-55669、55610) (Mail：ycni@nycu.edu.tw) Instrument Committee: Prof. Liu, Po-Tsun (TEL：03-5712121-52994) (Mail：ptliu@nycu.edu.tw)

Information:

1.Brand Model: Setting up by  SJ High Technology Company SJ-CA1200-D4

2.Purchase Date: 2012/12

3.Seat: Solid-State Electronics Building, 1F, 131R (TEL：55616) 

4.Services: 

(1).Dry & Wet Oxidation

(2).N-type & P-type  Drive-in

(3).SiO₂ / Si，High-K / Si .Ge (Sintering)

(4).Al Annealing

5.Specifications:

(1).Maximun Heating Temperature：1100 ℃

(2).Heating Zone Length：900mm；Chamber Diameter：6″

(3).Constant Temperature Zone Length：600mm ±1℃

(4).Heating Time from Room Temperature to 1100 ℃ : 2 hours. 

6.Machine Open Level, Open people, Training times.

7.Operation Manual  and Qualification Record Sheet.

Already have instrument use authority, must go to following website:

1.The Instruments Information System(Get Serial number)

2.Machine Reservation System(Reservation Use period)

Original Equipment Manufacturer: Oxidation & Diffusion furnaces Original Equipment Manufacturer 

Charging Method:

(1).“Ministry of Science and Technology” Project Expense:

	School Organization	Research Organization	Profit-Making Enterprise
Foundry fee (NTD/Once)	900	900	900
Startup fee + Production costs (NTD/hr)	155	220	220

(2).Not “Ministry of Science and Technology” Project Expense: 

	School Organization	Research Organization	Profit-Making Enterprise
Foundry fee (NTD/Once)	900	900	900
Startup fee + Production costs (NTD/hr)	310	2,200	2,200

Appeal phone:

1.TEL：03-5712121 ext.31534、31248 / 03-5131534

2.TEL：03-5712121 ext.31775 / 03-5731775

3.Dedicated telephone：03-6116690