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Instrument Manager: Mr. Lai, White
(TEL：03-5712121-55668、55616)
(Mail：white@nycu.edu.tw)
Instrument Committee: Prof. Liu, Po-Tsun
(TEL：03-5712121-52994)
(Mail：ptliu@nycu.edu.tw)
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Information:
1.Brand Model: J-10301001-1
2.Purchase Date: 2014/12/28
3.Seat: Solid-State Electronics Building, 1F, 121R (TEL：55616)
4.Services:
(1).Chamber：6″，600mm
(2).Pressure：5*10-3 Torr
(3).Temperature：POLY-Si-620°C，Si3N4-800°C，TEOS-700°C
5.Specifications:
(1).Poly-Si in-situ PH3:
Temperature：585°C
Gas：SiH4，PH3
Pressure：500mtorr
(2).poly-Si & amorphous-Si & SiGe:
Temperature：620°C/550°C
Gas：SiH4，GeH4
Pressure：300mtorr
(3).Si3N4:
Temperature：800°C/850°C
gas：SiH2Cl2，NH3
Pressure：120mtorr
(4).TEOS:
Temperature：700°C
Gas：TEOS
Pressure：120mtorr
Already have instrument use authority, must go to following website:
1.The Instruments Information System(Get Serial number)
2.Machine Reservation System(Reservation Use period)
Original Equipment Manufacturer: LPCVD Original Equipment Manufacturer
Charging Method:
1.“Ministry of Science and Technology” Project Expense:
| School Organization | Research Organization | Profit-Making Enterprise | ||
| Foundry fee | 900 | 900 | 900 | |
| A | Poly-Si Startup fee (NTD/Once) | 100 | 210 | 2100 |
| Poly-Si(SiH4 in-situ PH3) Production costs (NTD/Once) | 10 | 11 | 11 | |
| B | Poly-Si Production costs (NTD/minute) | 100 | 210 | 210 |
| Poly-Si(SiH4) Production costs (NTD/Once) | 10 | 11 | 11 | |
| C | Si3N4 Startup fee (NTD/Once) | 100 | 210 | 210 |
| Si3N4(low stress temperature 850°C)(NTD/minute) | 24 | 26 | 26 | |
| Si3N4(temperature 800°C)(NTD/minute) | 14 | 15 | 15 | |
| D | TEOS Startup fee (NTD/Once) | 100 | 210 | 210 |
| TEOS Production costs (NTD/minute) | 10 | 11 | 11 | |
2.Not “Ministry of Science and Technology” Project Expense:
| School Organization | Research Organization | Profit-Making Enterprise | ||
| Foundry fee | 900 | 900 | 900 | |
| A | Poly-Si Startup fee (NTD/Once) | 200 | 2100 | 2100 |
| Poly-Si(SiH4 in-situ PH3) Production costs (NTD/Once) | 20 | 105 | 105 | |
| B | Poly-Si Production costs (NTD/minute) | 200 | 2100 | 2100 |
| Poly-Si(SiH4) Production costs (NTD/Once) | 20 | 105 | 105 | |
| C | Si3N4 Startup fee (NTD/Once) | 200 | 2100 | 2100 |
| Si3N4(low stress temperature 850°C)(NTD/minute) | 48 | 252 | 252 | |
| Si3N4(temperature 800°C)(NTD/minute) | 28 | 147 | 147 | |
| D | TEOS Startup fee (NTD/Once) | 200 | 2100 | 2100 |
| TEOS Production costs (NTD/minute) | 20 | 105 | 105 | |
Appeal phone:
1.TEL：03-5712121 ext.31534、31248 / 03-5131534
2.TEL：03-5712121 ext.31775 / 03-5731775
3.Dedicated telephone：03-6116690