Instrument Manager: Mr. Tseng , Chun Hsien  (TEL：03-5712121-55670 / 55667) (Mail：e00465@nycu.edu.tw ) Instrument Committee: Prof. Su, Chun-Jung  (TEL：03-5712121-54261) (Mail：thhou@nycu.edu.tw)

Information:

1.Seat: Solid-State Electronics Building, 1F, 120R(TEL：55609) 

2.Include machine:

(1).HMDS Vacuum Oven

(2).Photo Resist Spinner

3.Machine Open Level, Open people, Training times.

4.Operation Manual  and Qualification Record Sheet.

Already have instrument use authority, must go to following website:

1.The Instruments Information System (Get Serial number)

2.Machine Reservation System(Reservation Use period)

Original Equipment Manufacturer: Litho Accessories Machine Original Equipment Manufacturer

Charging Method:

	School Organization	Research Organization	Profit-Making Enterprise
Foundry fee (NTD/piece) (No need for the second mask)(Within 3 slices)	900	900	900
Foundry fee (NTD/piece) (Need for the second mask) (Within 3 slices)	1400	1400	1400
“Ministry of Science and Technology” Project Expense (NTD/hour)	1200	1200	1400
Process : HMDS -> Coater -> Soft Bake -> Expose -> Developer -> Hard Bake  [Not included wafer]

Appeal phone:

1.TEL：03-5712121 ext.31534、31248 / 03-5131534

2.TEL：03-5712121 ext.31775 / 03-5731775

3.Dedicated telephone：03-6116690