Instrument Manager: Mr Huang, Guo- Hua
(TEL:03-5712121-55658、55608)
Instrument Committee: Prof. Cheng, Yu-Ting
(TEL:03-5712121-54169)
Information:
1.Brand Model: KD-Cluster
2.Purchase Date: 2018/11
3.Seat: Solid-State Electronics Building, 3F (TEL:55608) 
Already have instrument use authority, must go to following website:
2.Machine Reservation System(Reservation Use period)
Original Equipment Manufacturer: E-Gun (B) Original Equipment Manufacturer
Charging Method:
1.“Ministry of Science and Technology” Project Expense:
School Organization Research Organization Profit-Making Enterprise
Foundry fee  (NTD/Once) 900 900 900
Startup fee (NTD/Once) 750 1100 1100
Sputter Material fee (NTD/KA)
Ti=140   /  Ni=170   /   Ta=220   /  Al=85
E-Gun Material fee (NTD/KA) Ge=70  /  Ti=70  /  Mo=60  /  Ta=100  /  Co=60  /  W=60  /  Ni=50  /  Cr=70  /  Si=50  /  Pt=current price /  Pd=current price
2.Not “Ministry of Science and Technology” Project Expense
School Organization Research Organization Profit-Making Enterprise
Foundry fee  (NTD/Once) 900 900 900
Startup fee (NTD/Once) 1500 11000 11000
Sputter Material fee (NTD/KA)
(School Organization): Ti=280   /  Ni=340   /   Ta=440   /  Al=170
(Research Organization/Profit-Making Enterprise) Ti=1400   /  Ni=1700   /   Ta=2200   /  Al=850
E-Gun Material fee (NTD/KA)
(School Organization):
Ge=140  /  Ti=140  /  Mo=120  /  Ta=200  /  Co=120  /  W=120  /  Ni=100  /  Cr=140  /  Si=100  /  Pt=current price /  Pd=current price
(Research Organization/Profit-Making Enterprise)
Ge=700  /  Ti=700 /  Mo=600  /  Ta=1000  /  Co=600  /  W=600  /  Ni=500  /  Cr=700  /  Si=500  /  Pt=current price /  Pd=current price
Appeal phone:
1.TEL:03-5712121 ext.31534、31248 / 03-5131534
2.TEL:03-5712121 ext.31775 / 03-5731775
3.Dedicated telephone:03-6116690