Instrument Manager: Miss Fan, Hsiu-Lan  (TEL：03-5712121-55337 / 55672) (Mail：shiulan@nycu.edu.tw) Instrument Committee: Prof. Tan, Chih-Shan  (TEL：03-5712121-54146) (Mail：cstan@nycu.edu.tw)

Information:

1.Brand Model: Hitachi S-4700I

2.Purchase Date:1999/5/1

3.Seat: Microelectronics and Information Systems Research Building, 710R (TEL：55676)  

4.Services: SEM/ EDS

5. Specifications:

(1). Electron Source：Cathode Electronic Gun.

(2). Voltage：0.5kV~30kV.

(3). Sample Size：25mm diameter x 10mm(t).

(4). Resolution：15 A° (at 15kV) or 25A° (at 1kV)

(5). 5 hundred thousand’s magnification (Good Image : hundred thousand’s magnification).

(6). Second Electron Resolution : 1.5nm(15kV).

(7).  EDS(B⁵~U⁹²）.

6.Machine Open Level, Open people, Training times.

7.Operation Manual  and Qualification Record Sheet.

Already have instrument use authority, must go to following website:

1.Machine Reservation System(Reservation Use period)

Charging Method:

Self Operation	School Organization (Restricted to NYCU authorized persons)	Research Organization/Profit-Making Enterprise
SEM (NTD/hr)	100	Not Open
Sample surface coating (NTD/minute)	500

Delegate Operation	School Organization (Off-campus)	School Organization (on-campus)	Research Organization/Profit-Making Enterprise
Foundry fee (NTD/3hrs)	900	900	900
SEM (NTD/hr)	1000	100	2000
Sample surface coating (NTD/minute)	500	500	800