Machine：Evaporator Instrument Committee：Prof. Meng, Hsin-Fei Laboratory Phone：56223

Information:

1.Brand Model: ULVAC

2.Purchase Date: 2005/5/1

3.Seat: Boai campus Nano Facility Center 2F, 212R  (TEL:55680)

4.Services: Evaporated metal and organic materials.

5.Specifications:

(1).The pre-processing room reaches 1.3X10-3Pa (5X10-6Torr) in 30 minutes.

(2).The organic vapor deposition chamber reaches 1.3X10-3Pa (5X10-6Torr) in 30 minutes.