Instrument Manager: Mr. Chan, Chia-Chi (TEL：TEL：03-5712121-55622、55608) (Mail：chiachichan@nycu.edu.tw) Instrument Committee: Prof. Tsui, Bing-Yue   (TEL：03-5712121-31570) (Mail：bytsui@nycu.edu.tw)

Information:

1.Brand Model: SOPRA GES5

2.Purchase Date: 2003/11

3.Seat: Solid-State Electronics Building 1F 116R　(TEL：55666) 

4.Services:To measure the film thickness and refraction index

5.Specifications:

(1).Thickness measurement and refractive coefficient characterization  for transparent thin films such as SiO2, poly-Si and Si3N4.

(2). Variable incident wavelengths from 210 to 900 nm with resolution of ±0.04 nm at 313 nm.

(3). Analyses for two or three materials mixture, complex or periodic multi-layers structures, and  isotropic or anisotropic layers .

(4). Alloys modeling for compound semiconductors .

6.Machine Open Level, Open people, Training times.

7.Operation Manual  and Qualification Record Sheet.

Already have instrument use authority, must go to following website:

1.Machine Reservation System(Reservation Use period)

Original Equipment Manufacturer: Ellipsometer Original Equipment Manufacturer

Charging Method:

	School Organization	Research Organization	Profit-Making Enterprise
Self Operation (NTD/hr)	1000	1000	1000
Delegate Operation (NTD/hr)	1800	2400	3000