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Instrument Committee: Prof. Cheng, Yu-Ting
(TEL：03-5712121-54169)
(Mail：ytcheng@mail.nctu.edu.tw)
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Information:
1.Brand Model: ULVAC EBX-10C
2.Purchase Date: 1993/5
3.Seat: Solid-State Electronics Building, 3F (TEL：55608)
4.Services: Film deposition.
5.Specifications:
(1). EB gun Model EGL-35M * 5kw EB power
(2). Cryo pump U-10 pu (2300 L/S N2)，Lowest pressure 3.0E-7 Torr
(3). Substrate Size：4″, 6″.
Already have instrument use authority, must go to following website:
1.The Instruments Information System (Get Serial number)
2.Machine Reservation System(Reservation Use period)
Original Equipment Manufacturer: E-Gun (B) Original Equipment Manufacturer
Charging Method:
1.“Ministry of Science and Technology” Project Expense:
| School Organization | Research Organization | Profit-Making Enterprise | |
| Foundry fee (NTD/Once) | 900 | 900 | 900 |
| Startup fee (NTD/Once) | 550 | 770 | 770 |
| Material fee (NTD/KA) | Ni=50 / Si=50 / Co=60 / W=60 / SiO2=60 / Mo=60 / Ti=70 / Ge=70 / Cr=70 / Si3N4=90 / Cu=40 / Ta=100 / Pt=current price / Pd=current price / Au=current price | ||
2.Not “Ministry of Science and Technology” Project Expense:
| School Organization | Research Organization | Profit-Making Enterprise | |
| Foundry fee (NTD/Once) | 900 | 900 | 900 |
| Startup fee (NTD/Once) | 1100 | 7700 | 7700 |
| Material fee (NTD/KA) |
(School Organization):
Ni=100 / Si=100 / Co=120 / W=120 / SiO2=120 / Mo=120 / Ti=140 / Ge=140 / Cr=140 / Si3N4=180 / Cu=80 / Ta=200 / Pt=current price / Pd=current price / Au=current price
(Research Organization/Profit-Making Enterprise):
Ni=500 / Si=500 / Co=600 / W=600 / SiO2=600 / Mo=600 / Ti=700 / Ge=700 / Cr=700 / Si3N4=900 / Cu=400 / Ta=1000 / Pt=current price / Pd=current price / Au=current price
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Appeal phone:
1.TEL：03-5712121 ext.31534、31248 / 03-5131534
2.TEL：03-5712121 ext.31775 / 03-5731775
3.Dedicated telephone：03-6116690