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Instrument Manager: Mr. Tseng , Chun Hsien
(TEL：03-5712121-55670 / 55667)
(Mail：e00465@nycu.edu.tw )
Instrument Committee: Prof. Su, Chun-Jung
(TEL：03-5712121-54261)
(Mail：thhou@nycu.edu.tw)
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Information:
1.Brand Model: AG1000-4D-D-S-M-V
2.Purchase Date: 2011/11/1
3.Seat: Solid-State Electronics Building, 1F, 137R (TEL：55616)
4.Services:
(1).Mask holder：4″x4″ , 5″x5″
(2).Chuck：4″
(3).Exposure size：4″
(4).Light source：1000W
(5).NUV
Already have instrument use authority, must go to following website:
1.The Instruments Information System (Get Serial number)
2.Machine Reservation System(Reservation Use period)
Original Equipment Manufacturer: Double Side Mask Aligner Original Equipment Manufacturer
Charging Method:
1.“Ministry of Science and Technology” Project Expense:
| School Organization | Research Organization | Profit-Making Enterprise | |
|
Foundry fee (Within 3 slices)
(No need for the second mask)
|
900 | 900 | 900 |
|
Foundry fee (Within 3 slices)
(Need for the second mask)
|
1400 | 1400 | 1400 |
| “Ministry of Science and Technology” Project Expense (NTD/hour) | 120 | 120 | 140 |
2.Not “Ministry of Science and Technology” Project Expense:
| School Organization | Research Organization | Profit-Making Enterprise | |
|
Foundry fee (Within 3 slices)
(No need for the second mask)
|
900 | 900 | 900 |
|
Foundry fee (Within 3 slices)
(Need for the second mask)
|
1400 | 1400 | 1400 |
| “Ministry of Science and Technology” Project Expense (NTD/hour) | 1000 | 1200 | 1400 |
Appeal phone:
1.TEL：03-5712121 ext.31534、31248 / 03-5131534
2.TEL：03-5712121 ext.31775 / 03-5731775
3.Dedicated telephone：03-6116690