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Instrument Committee: Prof. Hou, Tuo-Hung (Alex)
(TEL：03-5712121-54261)
(Mail：thhou@nycu.edu.tw)
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Information:
1.Brand Model: VTI E/B GUN COATER
2.Purchase Date: 1994/4
3.Seat: Solid-State Electronics Building, 2F 222R (TEL：54183)
4.Services: Film deposition.
5.Specifications:
(1).EB gun Model EGK-3M*2.5kw EB power
(2).Cryo pump Torr -8
(3). Substrate Size：3″、4″
Original Equipment Manufacturer: (Department of Electronics) E-Beam Evaporator System Original Equipment Manufacturer
Charging Method:
| School Organization | Research Organization | Profit-Making Enterprise | |
| Foundry fee (NTD/Once) | 900 | 900 | 900 |
| Startup fee (NTD/Once) | 5000 | 6000 | 7000 |
| Material fee (NTD/KA) | Ti=600 / Cr=600 / Al=600 / Au=10000 |
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